%0 Journal Article %T Generalized ellipsometry of artificially designed line width roughness %+ Laboratoire de physique des interfaces et des couches minces [Palaiseau] (LPICM) %A Foldyna, Martin %A Germer, Thomas A. %A Bergner, Brent C. %A Dixson, Ronald G. %< avec comité de lecture %@ 0040-6090 %J Thin Solid Films %I Elsevier %V 519 %P 2633-2636 %8 2011-02 %D 2011 %Z 2011TSF...519.2633F %R 10.1016/J.TSF.2010.11.085 %Z Physics [physics]/Physics [physics]/Optics [physics.optics]Journal articles %X We use azimuthally resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using one- and two-dimensional rigorous coupled-wave methods in order to evaluate the sensitivity of the experimental spectrally resolved data, measured using a generalized ellipsometer, to the dimensional parameters of LWR. The sensitivity is investigated in the context of multiple conical mounting (azimuth angle) configurations, providing more information about the grating profile. %G English %L hal-00757371 %U https://polytechnique.hal.science/hal-00757371 %~ X %~ CNRS %~ X-PICM %~ X-DEP %~ X-DEP-PHYS %~ LPICM