Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures - École polytechnique Access content directly
Journal Articles Journal of Chemical Physics Year : 2014
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hal-01230708 , version 1 (18-11-2015)

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Jean-Christophe Dornstetter, Bastien Bruneau, Pavel Bulkin, Erik V. Johnson, Pere Roca I Cabarrocas. Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures. Journal of Chemical Physics, 2014, 140 (23), ⟨10.1063/1.4883503⟩. ⟨hal-01230708⟩
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